Dissipation of micro-cantilevers as a function of air pressure and metallic coating

Abstract : In this letter, we characterize the internal dissipation of coated micro-cantilevers through their mechanical thermal noise. Using a home-made interferometric setup, we achieve a resolution down to 1E-14m/rtHz in the measurement of their deflection. With the use of the fluctuation dissipation theorem and of the Kramers-Kronig relations, we rebuilt the full mechanical response function from the measured noise spectrum, and investigate frequency dependent dissipation as a function of the air pressure and of the nature of the metallic coatings. Using different thicknesses of gold coatings, we discuss the source of the internal viscoelastic damping.
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Tianjun Li, Ludovic Bellon. Dissipation of micro-cantilevers as a function of air pressure and metallic coating. EPL - Europhysics Letters, European Physical Society/EDP Sciences/Società Italiana di Fisica/IOP Publishing, 2012, 98, pp.14004. ⟨10.1209/0295-5075/98/14004⟩. ⟨ensl-00636839⟩

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