Dissipation of micro-cantilevers as a function of air pressure and metallic coating - Archive ouverte HAL Access content directly
Journal Articles EPL - Europhysics Letters Year : 2012

Dissipation of micro-cantilevers as a function of air pressure and metallic coating

(1, 2) , (1)
1
2

Abstract

In this letter, we characterize the internal dissipation of coated micro-cantilevers through their mechanical thermal noise. Using a home-made interferometric setup, we achieve a resolution down to 1E-14m/rtHz in the measurement of their deflection. With the use of the fluctuation dissipation theorem and of the Kramers-Kronig relations, we rebuilt the full mechanical response function from the measured noise spectrum, and investigate frequency dependent dissipation as a function of the air pressure and of the nature of the metallic coatings. Using different thicknesses of gold coatings, we discuss the source of the internal viscoelastic damping.
Fichier principal
Vignette du fichier
epl-tjli.pdf (315.4 Ko) Télécharger le fichier
Origin : Files produced by the author(s)
Loading...

Dates and versions

ensl-00636839 , version 1 (28-10-2011)

Identifiers

Cite

Tianjun Li, Ludovic Bellon. Dissipation of micro-cantilevers as a function of air pressure and metallic coating. EPL - Europhysics Letters, 2012, 98, pp.14004. ⟨10.1209/0295-5075/98/14004⟩. ⟨ensl-00636839⟩
71 View
145 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More