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Article Dans Une Revue Nanotechnology Année : 2009

Frequency dependence of viscous and viscoelastic dissipation in coated micro-cantilevers from noise measurement

Pierdomenico Paolino
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Ludovic Bellon

Résumé

We measure the mechanical thermal noise of soft silicon atomic force microscopy cantilevers. Using an interferometric setup, we have a resolution down to 1E-14 m/rtHz on a wide spectral range (3 Hz to 1E5 Hz). The low frequency behavior depends dramatically on the presence of a reflective coating: almost flat spectrums for uncoated cantilevers versus 1/f like trend for coated ones. The addition of a viscoelastic term in models of the mechanical system can account for this observation. Use of Kramers-Kronig relations validate this approach with a complete determination of the response of the cantilever: a power law with a small coefficient is found for the frequency dependence of viscoelasticity due to the coating, whereas the viscous damping due to the surrounding atmosphere is accurately described by the Sader model.
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Dates et versions

ensl-00362038 , version 1 (17-02-2009)
ensl-00362038 , version 2 (25-09-2009)

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Pierdomenico Paolino, Ludovic Bellon. Frequency dependence of viscous and viscoelastic dissipation in coated micro-cantilevers from noise measurement. Nanotechnology, 2009, 20 (20), pp.405705. ⟨10.1088/0957-4484/20/40/405705⟩. ⟨ensl-00362038v2⟩
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