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Journal Articles Optics Communications Year : 2002

Differential interferometry with a complex contrast

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Abstract

We present a new design of the Nomarski interferometer, which can measure displacements of several microns, with a resolution better than 10(-13) m/rootHz. In the standard design this sensitivity can be achieved only within a 100 nm displacement range. One main advantage of this new set-up of the interferometer is the total independence of the measure sensitivity on the interferometer thermal drifts.

Dates and versions

ensl-00179781 , version 1 (16-10-2007)

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Ludovic Bellon, Sergio Ciliberto, Hatem Boubaker, Laurent Guyon. Differential interferometry with a complex contrast. Optics Communications, 2002, 207, pp.49-56. ⟨10.1016/S0030-4018(02)01475-X⟩. ⟨ensl-00179781⟩
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