Differential interferometry with a complex contrast

Ludovic Bellon (1) , Sergio Ciliberto (1) , Hatem Boubaker (1) , Laurent Guyon (1)

1 Phys-ENS - Laboratoire de Physique de l'ENS Lyon

We present a new design of the Nomarski interferometer, which can measure displacements of several microns, with a resolution better than 10(-13) m/rootHz. In the standard design this sensitivity can be achieved only within a 100 nm displacement range. One main advantage of this new set-up of the interferometer is the total independence of the measure sensitivity on the interferometer thermal drifts.

Keywords: interferometer; quadrature phase

Domains: Physics [physics]; Physics [physics]; Instrumentation and Detectors [physics.ins-det]; Physics [physics]; Physics [physics]; Optics [physics.optics]

Ludovic Bellon, Sergio Ciliberto, Hatem Boubaker, Laurent Guyon. Differential interferometry with a complex contrast. Optics Communications, 2002, 207, pp.49-56. ⟨10.1016/S0030-4018(02)01475-X⟩. ⟨ensl-00179781⟩