Abstract : We present a new design of the Nomarski interferometer, which can measure displacements of several microns, with a resolution better than 10(-13) m/rootHz. In the standard design this sensitivity can be achieved only within a 100 nm displacement range. One main advantage of this new set-up of the interferometer is the total independence of the measure sensitivity on the interferometer thermal drifts.
https://hal-ens-lyon.archives-ouvertes.fr/ensl-00179781
Contributeur : Ludovic Bellon
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Soumis le : mardi 16 octobre 2007 - 16:14:02
Dernière modification le : jeudi 19 avril 2018 - 14:54:03
