Université de Lyon (92 rue Pasteur - CS 30122, 69361 Lyon Cedex 07 - France)
Abstract : We present a new design of the Nomarski interferometer, which can measure displacements of several microns, with a resolution better than 10(-13) m/rootHz. In the standard design this sensitivity can be achieved only within a 100 nm displacement range. One main advantage of this new set-up of the interferometer is the total independence of the measure sensitivity on the interferometer thermal drifts.
https://hal-ens-lyon.archives-ouvertes.fr/ensl-00179781 Contributor : Ludovic BellonConnect in order to contact the contributor Submitted on : Tuesday, October 16, 2007 - 4:14:02 PM Last modification on : Monday, November 30, 2020 - 12:24:01 PM