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Journal articles
Differential interferometry with a complex contrast
Abstract : We present a new design of the Nomarski interferometer, which can measure displacements of several microns, with a resolution better than 10(-13) m/rootHz. In the standard design this sensitivity can be achieved only within a 100 nm displacement range. One main advantage of this new set-up of the interferometer is the total independence of the measure sensitivity on the interferometer thermal drifts.
keyword :
interferometer
quadrature phase
https://hal-ens-lyon.archives-ouvertes.fr/ensl-00179781
Contributor : Ludovic Bellon <>
Submitted on : Tuesday, October 16, 2007 - 4:14:02 PM
Last modification on : Monday, November 30, 2020 - 12:24:01 PM
Contributor : Ludovic Bellon <>
Submitted on : Tuesday, October 16, 2007 - 4:14:02 PM
Last modification on : Monday, November 30, 2020 - 12:24:01 PM